Téléchargez le livre : Resonant MEMS

Resonant MEMS

Fundamentals, Implementation, and Application de

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Éditeur :

Wiley-VCH


Collection :

Advanced Micro and Nanosystems

Paru le : 2015-04-22

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Description

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Pages
512 pages
Collection
Advanced Micro and Nanosystems
Parution
2015-04-22
Marque
Wiley-VCH
EAN papier
9783527335459
EAN PDF
9783527676361
Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
512
Taille du fichier
8110 Ko
Prix
163,47 €
EAN EPUB
9783527676354
Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
512
Taille du fichier
32891 Ko
Prix
163,47 €

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