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Télécharger le livre : Flash Lamp Annealing
Slawomir Prucnal , Lars Rebohle , Denise Reichel
Flash Lamp Annealing
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed...
Editeur : Springer
Parution : 2019-07-27
Collection : Springer Series in Materials Science
Format(s) : PDF, ePub
126,59 €
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