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Télécharger le livre : Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Seongbo Shim , Youngsoo Shin
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its...
Editeur : Springer
Parution : 2018-03-21
Collection : NanoScience and Technology
Format(s) : PDF, ePub
94,94 €
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